Tungsten target, also known as tungsten sputtering target, is a product made of pure tungsten powder as raw material. It has a silvery white appearance and is popular in many fields due to its excellent physical and chemical properties.
Tungsten Sputtering Target details
Material: W1
Type: flat target, rotating target
Shape: tubular, square, round, long strip
Purity: 99.95%, 99.97%
Conventional density: 19.0g/cm3~19.2g/cm3
High density: >19.2g/cm3
Size: processed according to the drawing to meet the precision requirements
Product features: high density, high purity, fine grains, good density
The main uses of tungsten targets include:
1. Preparation of electronic devices: Tungsten targets are widely used in the preparation of electronic devices, such as integrated circuits (ICs), flat panel displays (FPDs), solar cells, etc. During the preparation process, the tungsten target is placed in a target gun in a vacuum chamber, and tungsten atoms or ions are released through ion bombardment or electron beams, which are deposited on the surface of the substrate to form the required tungsten film.
2. Conductive materials: Tungsten targets are often used in the preparation of conductive materials due to their good conductivity and high melting point. They can be used to prepare high-temperature resistors, electrode materials, high-power electronic devices, etc.
Users of tungsten targets include semiconductor manufacturers, display manufacturers, photovoltaic industry, electronic device manufacturers, scientific research institutions, etc. These industries and units widely use tungsten targets in the fields of film preparation, material research, and electronic device production.
Process flow:
Flat target: tungsten powder-pressing-sintering-rolling-deep processing-surface treatment-finished product-testing-packaging
Small rotary target: tungsten powder-pressing-sintering-forging-deep processing-surface treatment-finished product-testing-packaging
Large rotary target: tungsten powder-pressing-sintering-deep processing-surface treatment-finished product-testing-packaging
Tungsten sputtering targets are used for magnetron sputtering coating. Sputtering coating is one of the main methods of physical vapor deposition (PVD). It is used to deposit thin films with special functions on the surface. Sputtering targets are mainly used in flat panel display coating, semiconductor coating, glass coating, solar cell coating, decorative coating and other industries.
